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Optical generation of surface acoustic waves guided at the linear boundary between two thin films

机译:在两个薄膜之间的线性边界处引导的表面声​​波的光学生成

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摘要

Laser-induced transient grating measurements and ultrafast optical pump-probe imaging of surface acoustic waves near a linear boundary between copper and silica films on a silicon substrate indicate the presence of a boundary-localized mode with a phase velocity slightly below the Rayleigh wave velocity on the copper film. We analyze in detail the dispersion of this localized mode in comparison with that of the Rayleigh waves in the surrounding materials. The existence of the localized mode is ascribed to the nonuniformity of the copper film thickness near its edge resulting from polishing during fabrication.
机译:激光诱导的瞬态光栅测量和在硅衬底上的铜和二氧化硅膜之间的线性边界附近的表面声波的超快光学泵浦探测成像表明存在边界定位模式,其相速略低于瑞利波速度。铜膜。与周围材料中的瑞利波相比,我们详细分析了该局域模的色散。局部模式的存在归因于在制造过程中由于抛光而导致在其边缘附近的铜膜厚度的不均匀性。

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